| 摘要 |
PROBLEM TO BE SOLVED: To reduce warping of a flange of a valve element part at least. SOLUTION: A static induction type micro-valve is composed of a frame, the valve element part 11 provided inside it, and having a flange 110 at an outer circumferential edge on one surface side, a beam stretched between the flange 110 and an inner circumferential edge of the frame to support the valve element part 11 to be capable of making displacement along a thickness direction of the frame, a valve element base board having a movable electrode formed on one surface side of the valve element part 11, and a valve seat having a valve port, and a fixed electrode provided on a valve port edge part to face the movable electrode to separably get in contact with the valve element part 11 through an insulation layer formed on at least either of both electrodes. On a counter surface of at least the valve element part 11 of the valve element part 11 and the beam to the valve seat, a thin film layer 111 of a larger linear expansion coefficient than that of the valve element part 11 and the beam is laminated to enclose a thin film layer 112 of a smaller linear expansion coefficient than that of the valve element part 11 and the beam. COPYRIGHT: (C)2005,JPO&NCIPI
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