| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treating device that can prevent the photo-corrosion of the treated surfaces of substrates due to the light projected upon the surfaces. SOLUTION: Covers (light shielding members) which interrupt the incidence of light to the treated surfaces of substrates held by substrate transport robots 130, 230, and 310 are installed to the robots 130, 230, and 310. Light shielding members are also attached to a temporary substrate placing base 210, inverting machines 150 and 250, a precleaning device 240, pre-treating devices 320 and 340, plating equipment 360, a post-cleaning device 260, and a lighting means 400. In addition, a light shielding member is also attached to a window provided in a housing 11. Since the incidence of light to the treated surfaces of the substrates is interrupted by these light shielding members, the photo-corrosion of the treated surfaces of the substrates can be prevented. COPYRIGHT: (C)2005,JPO&NCIPI
|
