| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of detecting a pinhole, which accurately detects pinhole defects in a transparent / translucent film formed on an opaque membrane. <P>SOLUTION: The method of detecting pinhole has a polymer membrane 2 irradiated with irradiation light 8, receives only a light of specific wavelength among the light emitted from the polymer molecule membrane, and detects the presence or the absence of the pinhole 1 in the polymer molecule membrane 2, based on the amount of light of the received light. By using this pinhole detection method, the film being an object to be inspected is irradiated with a light as the irradiation light which reacts with the components of the film, and only the light having a specific wavelength band is detected among light emitted from the film, after reacting with the irradiation light, and the pinhole 1 can be detected based on the amount of light of the detected light. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
