| 摘要 |
A cleaning solution injecting unit is provided to change a cleaning solution into spray by branching a flow in which the cleaning solution and a gas are mixed into two flow paths. A cleaning solution spray unit(100) comprises a first flow channel(110), a second fluid channel(120), a mixing portion(130), and a discharge unit(140). A first fluid substrate is used for transferring the cleaning solution, and a first flow channel is connected with a cleaning solution supply source. A second flow channel is used for transferring a gas to change the cleaning solution into a droplet. The mixing portion has a mixed space(132) for mixing the cleaning solution and a gas, and discharge unit is connected with the mixing portion. The discharging unit has a third flow channel(142) which is branched into two channel.
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