摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor that can be satisfactorily practically used without peeling of a sensitive layer even when used in a severe condition, for example, in an exhaust gas atmosphere or the like, as the sensitive layer is in close contact with a substrate. SOLUTION: A pair of comb electrodes 11, 13 is formed on an insulating substrate 5 comprising a ceramic, in an ammonia sensor 1, and the sensitive layer 15 is provided on the comb-toothed electrodes 11, 13. A gas sensitive body comprising a compound oxide of WO<SB>3</SB>/ZrO<SB>2</SB>that is a solid superacid substance is formed on a surface of a support body 16 comprising zirconia of a porous ceramic, in the sensitive layer 15. COPYRIGHT: (C)2005,JPO&NCIPI
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