| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanning apparatus capable of gently and roughly moving at a constant speed and surely stopping at a desired location without a heating means. SOLUTION: A cylindrical slide member 31 has a low friction coefficient and a low abrasion property without lubrication and is inserted between a thick pipe 12 and an inner cylinder 13. A cylindrical actuator 32 has a shape radially distorted in response to an input voltage and is fitted to an outer circumference in the vicinity of an opening of the thick pipe 12. If an opening shape of the thick pipe 12 is deformed by applying a predetermined drive voltage to the cylindrical actuator 32 and radially and properly distorting the shape, the inner cylinder 13 internally inserted can be clamped and fixed. COPYRIGHT: (C)2005,JPO&NCIPI
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