发明名称 APPARATUS FOR MANUFACTURING CARBON NANOTUBE
摘要 PROBLEM TO BE SOLVED: To provide a carbon nanotube capable of achieving a uniform electron emission, a driving at low voltage and extention of service life. SOLUTION: This apparatus comprises a sealed reaction vessel 1, a raw gas feed pipe 7 and a catalyst metal solution feed pipe 8 which are disposed on a top part of the vessel, a reaction zone 9 which is disposed close to an upper end of the vessel to form a carbon nanotube by a chemical vapor deposition method, an electrostatic zone 14 which is disposed below the reaction zone to arrange the carbon nanotube in a vertical direction by the electrostatic effect and accelerate it downwardly, a substrate 11 having a conductive resin layer 21 which is disposed below the electrostatic zone to fix the descending carbon nanotube thereto, and an exhaust port 20 formed in a bottom wall 6 of the reaction vessel. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004323871(A) 申请公布日期 2004.11.18
申请号 JP20030116131 申请日期 2003.04.21
申请人 HITACHI ZOSEN CORP 发明人 INOUE TETSUYA;DAIKU HIROYUKI;ISHIBE JIROU
分类号 C01B31/02;C23C16/26;(IPC1-7):C23C16/26 主分类号 C01B31/02
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