申请人 |
SHIN-ETSU HANDOTAI CO., LTD.;SHIN-ETSU CHEMICAL CO., LTD.;JAPAN AS REPRESENTED BY PRESIDENT OF JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;TAKAHASHI, MASATOSHI;OHTSUKA, HIROYUKI;MATSUMURA, HIDEKI;MASUDA, ATSUSHI;IZUMI, AKIRA |
发明人 |
TAKAHASHI, MASATOSHI;OHTSUKA, HIROYUKI;MATSUMURA, HIDEKI;MASUDA, ATSUSHI;IZUMI, AKIRA |