| 摘要 |
PURPOSE: To maximize evaporation efficiency by minimizing density of a part of tablet to give porosity to the part and increasing density of the other part except the porous part in such a way that the part having high density supports the tablet, thereby minimizing retention time of a material to be evaporated. CONSTITUTION: The ceramic tablet for vacuum evaporation comprises an impregnation part (1) having low density to which porosity is given; and a supporting part (2) having high density for supporting the impregnation part, wherein the ceramic tablet further comprises a groove (3) formed in a lower part of the tablet so that a material to be evaporated is impregnated for one time of evaporation, wherein the ceramic tablet comprises a central projection part having low density and an edge part having high density to ensure mechanical strength if the material to be evaporated is discriminatively impregnated, and wherein the central projection part is formed in a spherical shape to uniformly evaporate the material to be evaporated in a vacuum evaporator.
|
