METHOD OF MANUFACTURING MONOLITHIC INK JET PRINT HEAD IN WHICH DEWETTING PHENOMENON IS REMOVED

摘要

PURPOSE: A method of manufacturing a monolithic ink jet print head is provided to improve an ink exhaust performance by uniformly forming a fluid path. CONSTITUTION: A heater layer is formed, and then, the heater layer remains only in a part in which an ink chamber is formed by patterning with respect to the heater layer. After forming a negative photo-resist layer on the substrate(110), a patterning process is performed with respect to a result structure, thereby forming a fluid path plate. After forming a positive photo-resist layer on the fluid path plate(130), the patterning process is performed with respect to a result structure, thereby forming a first sacrificial layer. After forming a positive photo-resist layer on the first sacrificial layer, the patterning process is performed with respect to a result structure, thereby forming a second sacrificial layer. A nozzle plate is formed on the second sacrificial layer and the fluid path plate. A nozzle(106) is formed on the nozzle plate.