| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measuring device with no significant difference of precision in measurement directions, even for a three-dimensional profile measurement that uses an anisotropic profile measurement that fluctuates in measurement precision depending on measurement directions. SOLUTION: First incident angle adjusting part 21 and second incident angle adjusting part 22 adjust for forming first and second stereographic images with an object 9 by adjusting a relative incident angle between a beam 7 projected on the object 9 by an image forming optical system 10 and the object 9 to first and second neutral axis directions of the object 9. A matching process part 30 searches a point corresponding to a measurement point, with the direction almost orthogonal to the first and second neutral axes in the first and second stereographic images as first and second search directions. A profile measuring part 34 acquires a three-dimensional coordinate data of the object 9 from the relation between the corresponding point and the measurement point in the first and second stereographic images. COPYRIGHT: (C)2005,JPO&NCIPI
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