DEVICE AND METHOD FOR OBSERVING POINT IMAGE ON AND OUTSIDE LENS AXIS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for observing a point image on and outside a lens axis for observing aberrations on and outside the axis of a lens to be inspected by a practical method. SOLUTION: The apparatus for observing a point image on and outside a lens axis comprises: a lens 11 to be inspected; an illumination optical system 13 for guiding parallel light to the rear edge side of the lens 11 to be inspected; a spherical mirror 9 arranged at the tip side of the lens 11 to be inspected for achieving reflection so that emission luminous flux axis emitted from the tip of the lens 11 to be inspected and a reflection luminous flux axis become the same luminous flux axis; and a point image observation optical system 14 for observing a point image by reflection luminous flux passing through the lens 11 to be inspected. At lest one of the optical axis of the illumination optical system 13 and that of the point image observation optical system 14 and the optical axis of the lens 11 to be inspected are relatively inclined. COPYRIGHT: (C)2005,JPO&NCIPI