| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator of less wear at a frictional part even if it is used in vacuum as in a semiconductor manufacturing process. <P>SOLUTION: In the piezoelectric actuator, a piezoelectric element is repeatedly displaced near the resonance frequency of the actuator so that the drive member of it performs elliptic movement. A frictional member is provided which transmits the elliptic movement to a mobile body. At least either the drive member or the frictional member employs a gray-color ceramics. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
