发明名称 DRY AIR SUPPLYING APPARATUS AND ITS OPERATION METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a dry air supplying apparatus constituted so that dry air having a low dew point can be supplied to the objective space immediately when required by keeping this apparatus in an operated state even when not required. <P>SOLUTION: This dry air supplying apparatus 1 is provided with two rotors 4a, 4b on each of which an adsorbent is deposited and the rotational area of each of which is partitioned by a partitioning member 3 into at least an adsorption zone S and a regeneration zone U, a driving means 5 for rotary driving the rotors 4a, 4b, a supply route 6 for supplying to the objective space the dry air obtained by making the sucked air pass through the zones S of the rotors 4a, 4b successively to remove moisture and organic matter and a regeneration route 7 for regenerating the adsorbent deposited on each of the rotors 4a, 4b by heating a part of the obtained dry air and making the heated dry air pass through the zones U of the rotors 4a, 4b successively. A return route 27 is arranged for returning the dry air from the side of an outlet of the route 6 to the side of an inlet. Valves 30, 31 are arranged respectively on the route 27 and on the side of the outlet of the route 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004321965(A) 申请公布日期 2004.11.18
申请号 JP20030121221 申请日期 2003.04.25
申请人 TOKYO ELECTRON LTD;NICHIAS CORP 发明人 KODAMA NORIAKI;TANAKA NOBUAKI
分类号 B01D53/06;B01D53/26;F24F3/14;F24F11/02;H01L21/02;(IPC1-7):B01D53/26 主分类号 B01D53/06
代理机构 代理人
主权项
地址