| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning method having a high removal effect on fine particles. SOLUTION: An object to be cleaned is immersed in a cleaning liquid. The object is cleaned by applying thereto ultrasonic waves under conditions that the sound pressure of the ultrasonic waves propagating in the cleaning liquid is higher then 5 mV and not higher than 50 mV. COPYRIGHT: (C)2005,JPO&NCIPI
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