摘要 |
The electronic device (100) comprises an electrical element (30), for instance a MEMS capacitor or a BAW filter in a cavity (37) that is protected from the environment by a cover (38). The cover (38) is a patterned layer which is mechanically embedded in isolating material (7) present beside the cavity (37) and may further include contact pads (41). The device (100) may be suitably manufactured from an accurately folded foil including a patterned layer and a protective layer (10). After applying the foil to the cavity (37) the isolating material (7) is provided. The patterned layer, or part thereof, stays behind and forms the cover (38). |