DEBRIS RECOVERY DEVICE IN EUV LIGHT GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the durability of an optical equipment including a condensing mirror in the chamber, maintain the degree of vacuum of the chamber, and suppress output degradation of the EUV light by efficiently recovering the debris colliding with the condensing mirror by high speed from the plasmized target and the debris adhering to the condensing mirror.

SOLUTION: A laser beam irradiation means 10 is arranged so that the irradiation direction of a laser beam L and the advance direction of a target 1 may be opposed to each other. A debris recovery means 30 for recovering the debris 3 is arranged in the advance direction of the target 1.

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