| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon heating apparatus using a graphite felt and its manufacturing method thereof. SOLUTION: In the carbon heating apparatus, a carbon heating body (20) where a carbon fiber such as the graphite felt is cut to be a predetermined cross section and length is sealed into a quartz glass tube (10). An unevenly formed side particle structure compared to the particle structure on a plane is made to be stable structure through a predetermined heat treating process by cutting the carbon fiber into the predetermined cross section and length. An arch discharge or a terminal secession produced between the carbon heating body (20) and a metal terminal can be prevented by using superior metal in contraction strength or compression strength such as Molybdenum or Nickel or the like in the both ends of the heat treated carbon heating body (20). This invention includes the manufacturing method of the apparatus. COPYRIGHT: (C)2005,JPO&NCIPI |
