| 摘要 |
PROBLEM TO BE SOLVED: To provide bonding equipment and a bonding tool which can realize stable oscillation characteristic. SOLUTION: In the bonding tool which sticks bonding object of interest by pressure by load and swinging, an inner diameter d of a wearing hole 15e formed in an oblong horn 15 provided with a vibrator 17 is set a little larger than the outer diameter D of a heater 18, which is installed maintaining clearance from the inner surface of the wearing hole 15e. Consequently, wearing state to the horn 15 of a heater 18 is always kept constant, and variation of rigid distribution of the whole horn can be prevented, so that stable oscillation characteristic can be realized. COPYRIGHT: (C)2005,JPO&NCIPI |
