| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element positioning device that can improve positioning accuracy of a fixing part of a movable part including an optical element and control the movable part to be positioned in 6-axis direction with respect to a reference structural body. SOLUTION: The positioning device is provided with a first movable part including an optical element, a first fixing part, a first driving means to drive the first movable part to the first fixing part, a first measuring means to measure a position of the first movable part against the first fixing part, a second measuring means to measure a displacement of the first movable part to the reference structural body, a first compensator to control the first driving means on the basis of the measurement result of the second measuring means. The first driving means, the second measuring means and the first compensator are used to position the optical element on the basis of the measurement result of the first measuring means. COPYRIGHT: (C)2005,JPO&NCIPI
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