发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and the manufacturing method of the same, having no restriction on pattern layout, on the kind of employed etching solution or the like, and is provided with a bipolar transistor capable of being manufactured by suppressing generation of mesa-shaped abnormalities. SOLUTION: The semiconductor device is constituted of semiconductor mesa structure bodies (EM,BM,SM), comprising the laminate of a collector layer 12; a base layer 13 and an emitter layer 14 in a substrate 10 and is formed so as to function as the operating region of a bipolar transistor; mesa structure bodies (PBM, PSM) for a base contact pad, which are formed so as to be apart from the semiconductor mesa structure bodies by a predetermined distance and is provided with a height identical to that of the upper surface of the base layer; a conductive layer 17, in which a base electrode 17a connected to the base layer; an electrode 17b for base contact pad, which is formed on the mesa structural body for base contact pad, in a region excluding the vicinity of a rim part PBMa on the upper surface of the mesa structure body for base contact pad; and a wiring unit 17c for connecting these electrodes, while these components are formed integrally. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004327717(A) 申请公布日期 2004.11.18
申请号 JP20030120393 申请日期 2003.04.24
申请人 SONY CORP 发明人 KOBAYASHI JUNICHIRO
分类号 H01L21/331;H01L29/423;H01L29/732;H01L29/737;(IPC1-7):H01L21/331 主分类号 H01L21/331
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