| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning projection aligner for forming a device by using an inexpensive mask irrespective of the device size. SOLUTION: In this scanning projection aligner having variable pattern generators 10a-10e for transfer pattern formation, projection optical systems PL1-PL5 for projecting the transfer patterns generated by the various pattern generators 10a-10e upon a photosensitive substrate P, and a substrate stage for scanning the photosensitive substrate P, the variable pattern generators 10a-10e have a controller that varies the transfer patterns generated by the variable pattern generators 10a-10e in synchronization with the scanning of the photosensitive substrate stage P, and the projection optical systems PL1-PL5 have an adjusting mechanism for adjusting the image formed of the transferred patterns. COPYRIGHT: (C)2005,JPO&NCIPI
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