PROCESS FOR PRODUCING ALUMINUM NITRIDE BY SUPPLYING REACTION CONTROLLER GAS TO REACTOR CHAMBER CONTAINING ALUMINUM POWDER AND ALUMINUM NITRIDE PREPARED THEREBY

摘要

PURPOSE: To provide a process for producing aluminum nitride whose particle diameters are fine, and an aluminum nitride prepared thereby . CONSTITUTION: The process comprises a step of holding an aluminum powder in a nitrogen atmosphere whose nitrogen gas pressure is in a range of from 105 to 300 kPa, thereby developing a nitriding reaction at a temperature of from 500 to 1,000 deg.C, wherein a reaction controller gas, controlling the development of the nitriding reaction, is supplied into a reactor chamber in which the aluminum powder is accommodated.