| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor wherein the processing time of a substrate can be shortened without using any expensive asher apparatus by contacting uniformly the bubbles of an ozone gas with the substrate. SOLUTION: Since a bubble feeding means 33 so has bubble generating components that bubbles overlap partly with each other in the direction of the surface of a substrate W, there can be eliminated any portion in the direction of the surface of the substrate W wherewith no bubble of an ozone gas is contacted, and the bubbles of the ozone gas can be contacted uniformly with the substrate W in the direction of its surface. Therefore, the processing time of the substrate W can be shortened without using any expensive asher apparatus. COPYRIGHT: (C)2005,JPO&NCIPI
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