发明名称 Method for drying washed objects
摘要 A method for drying washed objects which is capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects, and preventing energy loss. The apparatus for carrying on the method of drying washed objects includes a drying tank having an opening on the upper portion thereof so that the washed objects can be placed or taken out from above, and a rinsing tank formed integrally with the drying tank, and is capable of being sealed hermetically by closing an openable and closable lid. The drying tank includes a mist-straightening vane for supplying organic solvent mist at normal temperatures to the washed objects, so that the washed objects are dried by organic solvent mist emitted from the mist-straightening vane.
申请公布号 US2004226185(A1) 申请公布日期 2004.11.18
申请号 US20030693236 申请日期 2003.10.24
申请人 KAIJO CORPORATION 发明人 YAMAGUCHI KENSUKE;ISHIKAWA YOSHINORI;HAN KI
分类号 B08B3/08;B08B3/02;C23G3/00;F26B5/00;H01L21/00;H01L21/304;(IPC1-7):F26B3/00 主分类号 B08B3/08
代理机构 代理人
主权项
地址