INDUCTIVELY COUPLED PLASMA TORCH HAVING CYLINDRICAL INDUCTION COIL STRUCTURE AS INTEGRAL STRUCTURE OF INDUCTION COIL PART

摘要

PURPOSE: An inductively coupled plasma torch having a cylindrical induction coil structure as an integral structure of an induction coil part is provided to improve the performance by forming an induction coil part with the cylindrical induction coil structure and arranging the cylindrical induction coil structure to the coaxial direction between an external wall and a plasma confinement tube. CONSTITUTION: An inductively coupled plasma torch includes an external wall, a cylindrical induction coil structure, and a confinement tube. The cylindrical induction coil structure(8) includes an induction coil(15) and a power input part for supplying the power to the induction coil and is arranged to the coaxial direction of the external wall(7). The confinement tube(11) is arranged to the coaxial direction of the induction coil structure. The first flow path(23) is formed between the external wall and the cylindrical induction coil structure. The second flow path(24) is formed between the cylindrical induction coil structure and the confinement tube.