| 摘要 |
An object of the present invention is to provide a novel structure of supporting a vibrator having a terminal for electrical connection so that the vibrator can be miniaturized, and the driving impedance can be made constant in a wide temperature range to reduce the temperature drift. The structure has a substrate and bonding wires 45, 46 supported on the surface of the substrate and to be connected with the vibrator. The vibrator is supported with the bonding wire so that the vibrator is not directly contacted with the substrate. The bonding wire is electrically connected with the terminal. The resonance frequency "fr" of the supporting structure, the driving frequency "fd" for the vibrator and the detuning "Deltaf" satisfy the following formula. 1.Deltaf<=fr<=0.9.FD 1. |
