ACTIVE MATRIX PANEL INSPECTION DEVICE, INSPECTION METHOD, AND ACTIVE MATRIX OLED PANEL MANUFACTURING METHOD

摘要

Inspection of the function of a TFT array for the AMOLED panel is performed prior to the OLED formation step, thereby reducing the panel manufacturing cost. An active matrix OLED panel manufacturing method includes: an array step [1] for forming a TFT array on a substrate, thereby creating an active matrix panel; an inspection step [2] for inspecting the function of the active matrix panel created; and a cell step [3] for mounting an OLED on an active matrix panel which has been judged to be preferable in the inspection step [2]. In the inspection step [2], an opposing electrode is arranged in the vicinity of the surface where the OLED connection electrode is exposed in the active matrix panel created by the array step [1] and current flowing in the measurement object pixels constituting the active matrix panel is observed.