| 摘要 |
PROBLEM TO BE SOLVED: To provide a flexible processing head unit, and a polishing device having this unit for preventing dispersion in polishing accuracy by polishing a processing part under a uniform processing condition. SOLUTION: This polishing device is formed into a structure for uniformizing the pressure of a polishing tool to the processing part by holding a rotary shaft of the flexibly movable polishing tool by an elastic member. COPYRIGHT: (C)2005,JPO&NCIPI
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