| 摘要 |
PROBLEM TO BE SOLVED: To easily, quickly and stably detect an inclination of a beam quantitatively, and to allow applicatable even to diffusion beam. SOLUTION: This detector/method is provided with a transparent parallel plane plate 1 positioned to be perpendicular to an optical axis, and an image pick-up device for picking up an image from a surface side of the plane plate 1. A distance between the center position of the beam transmitted to the image separation lens system 9 and the center position of the beam emitted after reflected twice inside the plate 1 is found as to the beam incident into the plate 1 from a reverse face side, on the basis of the image picked up by the image pick-up device. The inclination of the beam to the optical axis incident into the parallel plane plate 1, is detected from a thickness of the plate 1, a refractive index thereof, and the distance between the center positions of the two beams. COPYRIGHT: (C)2005,JPO&NCIPI
|
