发明名称 |
Analysis method for semiconductor device, analysis system and a computer program product |
摘要 |
An analysis method for a semiconductor device includes measuring electrical characteristics of TEGs fabricated on a semiconductor substrate; classifying the TEGs into a first TEG category where a systematic failure has not occurred and a second TEG category where the systematic failure has occurred based on the electrical characteristics; creating a first comparison Mahalanobis reference space using first parameters of the TEGs in the first TEG category from among parameters of the TEGs expressed as numerical values; calculating a first comparison Mahalanobis distance of the first parameters and a second comparison Mahalanobis distance of second parameters of the TEGs in the second TEG category by using the first comparison Mahalanobis reference space; and comparing the first and second comparison Mahalanobis distances.
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申请公布号 |
US2004228186(A1) |
申请公布日期 |
2004.11.18 |
申请号 |
US20040784939 |
申请日期 |
2004.02.25 |
申请人 |
KADOTA KENICHI |
发明人 |
KADOTA KENICHI |
分类号 |
G01R31/00;G06F11/30;G11C7/00;H01L21/66;H01L23/544;(IPC1-7):G11C7/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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