发明名称 SENSOR SIGNAL TRANSMISSION FROM PROCESSING SYSTEM
摘要 A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.
申请公布号 US2004226390(A1) 申请公布日期 2004.11.18
申请号 US20030439521 申请日期 2003.05.16
申请人 BEGINSKI DAVID A. 发明人 BEGINSKI DAVID A.
分类号 H01L21/00;(IPC1-7):H01L21/66;G01M19/00 主分类号 H01L21/00
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