| 发明名称 |
Cooling apparatus, optical element having the same, and exposure apparatus |
| 摘要 |
A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through radiation in a non-contact manner.
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| 申请公布号 |
US2004227913(A1) |
申请公布日期 |
2004.11.18 |
| 申请号 |
US20040776717 |
申请日期 |
2004.02.11 |
| 申请人 |
KINO YOSHIKI |
发明人 |
KINO YOSHIKI |
| 分类号 |
G03F7/20;H01L21/027;(IPC1-7):G03B27/52 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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