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经营范围
发明名称
Visual inspection apparatus and method
摘要
申请公布号
EP0969498(A3)
申请公布日期
2004.11.17
申请号
EP19990110143
申请日期
1999.05.25
申请人
TOKYO SEIMITSU CO.,LTD.
发明人
KUWABARA, MASAYUKI
分类号
G01B11/30;G01N21/88;G01N21/956;H01L21/00;H01L21/66;(IPC1-7):H01L21/00
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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