A METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMING THE METHOD,申请号KR20047016179-传众专利搜索

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发明名称	A METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMING THE METHOD
摘要
申请公布号	KR20040097335(A)	申请公布日期	2004.11.17
申请号	KR20047016179	申请日期	2003.03.21
申请人		发明人
分类号	H01J37/304;H01J27/00;H01J37/30;H01J37/317	主分类号	H01J37/304
代理机构		代理人
主权项
地址

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