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发明名称
DEVICE AND METHOD FOR FORMING THIN-FILM, AND METHOD OF MANUFACTURING ELECTRONIC COMPONENT USING THE DEVICE
摘要
申请公布号
KR20040097318(A)
申请公布日期
2004.11.17
申请号
KR20047016013
申请日期
2003.04.01
申请人
发明人
分类号
H01L21/20;C23C14/04;C23C14/50;C23C14/56;C23C16/44;G11B7/26;H01L21/00;H01L21/677;H01L21/68
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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