发明名称 Multi-level integrated circuit for wide-gap substrate bonding
摘要 An integrated circuit (30) includes a substrate (10) having an etched surface and a non-etched surface. The etched surface contains circuit elements (22, 24) and the non-etched surface contains a bonding surface (18). The non-etched surface is located at a predetermined height (12) from the etched surface. Bonding this integrated circuit (30) with another substrate creates a wide-gap between the substrates that is preferably evacuated and hermetically sealed. <IMAGE>
申请公布号 EP1266863(A3) 申请公布日期 2004.11.17
申请号 EP20020253722 申请日期 2002.05.28
申请人 HEWLETT-PACKARD COMPANY 发明人 REGAN, MICHAEL J.;LIEBESKIND, JOHN;HALUZAK, CHARLES C.
分类号 H01L21/60;B81B7/00;B81C1/00;H01L25/00;(IPC1-7):B81B7/00 主分类号 H01L21/60
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