| 摘要 |
An acceleration sensor device with processing circuits constructed in an IC chip form is disclosed, and the IC chip and the acceleration sensor chip are integrated. The acceleration sensor device is constituted of an acceleration sensor chip constituted of elastic support arms (15), a mass portion (11) and a thick frame (14), a regulation plate (20) acting as stop member for restricting the movement of the mass portion, and a protection case (11). The regulation plate (20) is at the same time an IC chip having a processing circuit for electrically processing detected signals from the acceleration sensor chip, the IC chip also used as the regulation plate is disposed at an upper portion of the acceleration sensor chip with a predetermined gap (gl) from the acceleration sensor chip and electrically connected to the acceleration sensor chip via lead wires extending between bonding terminals, and the IC chip and the protection case are electrically connected to each other. <IMAGE> |
