METHOD FOR PREPARING GAS-TIGHT TERMINAL

摘要

An object of the present invention is to provide a low-priced and highly reliable high-vacuum hermetic seal package (30). To this end, a method of manufacturing a hermetic seal package (30) according to the present invention is a method of manufacturing a hermetic seal package (30) by anodically bonding an opening of a cylindrical body (31) for forming an outer frame and the outer edge of a flat glass plate (32) to each other, characterized in that anodically bonded surfaces are 0.04 mm to 200 mm in width and not more than 0.20 mu m in surface roughness, the cylindrical body (31) consists of a metal consisting of at least one of Fe, Ni and Co or an alloy or conductive ceramics mainly composed of this metal, the glass plate (32) contains alkaline metal ions, and the quantity of inert gas permeation on bonded portions is 1.0 x 10<-15> Pa.m<3>/s to 1.0 x 10<-8> Pa.m<3>/s after anodic bonding.