FOIL TRAP AND LIGHT SOURCE DEVICE USING SUCH FOIL TRAP

摘要

Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.

主权项

1. A rotational type foil trap arranged adjacent to a plasma that emits light, for allowing the light to transmit but trapping a debris from the plasma, comprising:
a plurality of foils radially extending from a main shaft, the plurality of foils being supported by a center support arranged on the main shaft and configured to be capable of being rotated by a rotary mechanism coupled to the center support with the center support being a rotation axis; and a plurality of grooves on a side face of the center support, one end of each of the foils being inserted into each of the groove, and the center support and each of the foils being fixed by brazing.