发明名称 Split-gate metal-oxide-semiconductor device
摘要 A metal-oxide-semiconductor (MOS) device is formed comprising a semiconductor layer of a first conductivity type, a first source/drain region of a second conductivity type formed in the semiconductor layer, and a second source/drain region of the second conductivity type formed in the semiconductor layer and spaced apart from the first source/drain region. The MOS device further comprises a first gate formed proximate an upper surface of the semiconductor layer and at least partially between the first and second source/drain regions, the first gate comprising a plurality of sections spaced apart from one another, and a second gate formed proximate the upper surface ofthe semiconductor layer, the second gate comprising a first end formed between at least two of the plurality of sections of the first gate and a second end opposite the first end formed above at least a portion of the first gate, the second end being wider than the first end, the first and second gates being electrically isolated from one another.
申请公布号 EP1478013(A2) 申请公布日期 2004.11.17
申请号 EP20040252609 申请日期 2004.05.05
申请人 AGERE SYSTEMS INC. 发明人 XU, SHUMING
分类号 H01L29/40;H01L21/336;H01L21/28;H01L29/417;H01L29/423;H01L29/49;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L29/40
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