| 摘要 |
The present invention relates to a rear electrode for a solar cell, in which alkali elements are easily diffused into a light absorption layer, and which prevents selenium from being diffused, thereby increasing light conversion efficiency at low cost while allowing appropriate ohmic contact, and also relates to a method for manufacturing a rear electrode for a solar cell, a solar cell using the rear electrode for a solar cell, and a method for manufacturing a solar cell using the rear electrode for a solar cell. Provided are a method for manufacturing a rear electrode for a solar cell, and the rear electrode for a solar cell, the method comprising: a first step of disposing a substrate in a first vacuum chamber, and forming an electrode having a plurality of columnar structures on the substrate by using a sputtering method; and a second step of forming nitration layers by nitrating at least part of the electrode having the columnar structures in a second vacuum chamber by using ammonia (NH_3) plasma. Furthermore, provided are a solar cell using the rear electrode for a solar cell, and a method for manufacturing a solar cell using the rear electrode for a solar cell, the solar cell comprising: a substrate; an electrode portion which is formed on the substrate; and a light absorption layer which is formed on the electrode portion, wherein the electrode portion comprises: a molybdenum layer which has a plurality of columnar structures on the substrate; a molybdenum nitride (Mo_2N) layer which is formed by nitrating at least part of the molybdenum layer, and which serves as a diffusion prevention layer; and a molybdenum selenide (MoSe_2) layer which is formed on the molybdenum nitride layer. |
