| 摘要 |
<p>A projection optical system that projects a pattern on a first surface onto a second surface, and has a numerical aperture of 0.85 or higher includes an optical element, and an antireflection coating applied to the optical element, the antireflection coating including plural layers, an end layer having a refractive index of tan{sin -1 (NA)} or greater, where NA is the numerical aperture of the projection optical system.</p> |
