| 摘要 |
<p>The pump has an outlet radial orifice (23) crossing a cylindrical peripheral wall (17). An integrated isolation and control valve has a coaxial annular closure unit (24) that comes in support against the wall around a radial outlet opening. The unit is axially driven by a motor (8) to place a shutter (26) opposite to the orifice for controlling an opening of the valve and regulating a flow of gas pumped by the pump. An independent claim is also included for a gas pumping system comprising a molecular, turbo-molecular, or hybrid pump.</p> |
