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发明名称
氧化物膜之原子层沈积法
摘要
本发明系提供一种可沉积氧化物膜之原子层沉积法。该方法系使用第一个铪前驱物中之硝酸盐配位子做为第二个铪前驱物之氧化剂以形成二氧化铪。对闸极介电质或电容器介电质应用而言,该方法经由使用硝酸铪前驱物及氯化铪前驱物,即非常适于将高k值之二氧化铪介电质沉积在氢–端基之矽表面上。
申请公布号
TW200424344
申请公布日期
2004.11.16
申请号
TW093104966
申请日期
2004.02.26
申请人
夏普股份有限公司
发明人
约翰 康利二世;大野芳睦;瑞珍卓 史兰奇
分类号
C23C16/40
主分类号
C23C16/40
代理机构
代理人
林志刚
主权项
地址
日本
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