Fabrication of stacked photonic lightwave circuits

摘要

We propose a technique for fabricating stacked photonic lightwave circuits (PLCs), with both high and low refractive index steps, comprising the use of etched PECVD dielectric layers for the light guiding structures and which are surrounded and separated by an interlayer PLC cladding (IPC) comprising a non-conformal layer of sol-gel, whose composition, refractive index and thickness can be tailored to the requirements of the device.