发明名称 Method of manufacturing surface acoustic wave device having bump electrodes
摘要 An electronic element includes a substrate with electrode pads provided thereon. Intermediate electrodes include base electrodes on the bottom surface of the intermediate electrodes, and the bottom surface of the intermediate electrodes are disposed on the electrode pads. Bump electrodes are provided on the intermediate electrodes and include a metal having a melting point of about 450° C. or more. Further, the base electrodes include a metallic material that can reduce orientation of the intermediate electrodes.
申请公布号 US6817071(B2) 申请公布日期 2004.11.16
申请号 US20010026811 申请日期 2001.12.27
申请人 MURATA MANUFACTURING CO., LTD. 发明人 TAGA SHIGETO
分类号 H01L21/60;H01L41/08;H02N2/00;H03H3/08;H03H9/05;H03H9/145;(IPC1-7):H04R17/00 主分类号 H01L21/60
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