PROBER SYSTEM FOR IMPROVING ALIGNMENT CONTROL OF NEEDLE AND ALIGNING METHOD THEREOF BY USING SHAPE MEMORY ALLOY AND TEMPERATURE CONTROLLER

摘要

PURPOSE: A prober system for improving an alignment control of a needle and an aligning method thereof are provided to correctly rapidly and correctly the needle regardless of increment of needles by using a shape memory alloy and a temperature controller. CONSTITUTION: A wafer chuck(23) is used for supporting and fixing a wafer. A prober card(21) includes a needle which is formed with a shape memory alloy. The needle is in contact with a pad of the wafer in order to detect an electrical characteristic of a chip. A heating unit heats the needle to the shape memory temperature. The heating unit is formed with a heating fan for generating hot wind. The needle is formed with the shape memory alloy including nickel.