Split contact structure and fabrication method thereof

摘要

A split contact structure includes a semiconductor substrate having a major surface; a first upwardly protruding structure disposed on the major surface; a first cell contact region in the major surface and being close to the first upwardly protruding structure; a second upwardly protruding structure disposed on the major surface; a second cell contact region in the major surface and being close to the second upwardly protruding structure; a first patterned layer stacked on the first upwardly protruding structure; a second patterned layer stacked on the first upwardly protruding structure; a first contact structure disposed on a sidewall of the first upwardly protruding structure and being in direct contact with the first cell contact region; and a second contact structure disposed on a sidewall of the second upwardly protruding structure and being in direct contact with the second cell contact region.

主权项

1. A split contact structure, comprising:
a semiconductor substrate having a major surface; a first upwardly protruding structure disposed on the major surface; a first cell contact region in the major surface and being close to the first upwardly protruding structure; a second upwardly protruding structure disposed on the major surface; a second cell contact region in the major surface and being close to the second upwardly protruding structure; a shallow trench isolation (STI) region between the first cell contact region and the second cell contact region; wherein the first cell contact region and the second cell contact region are both in contiguous with the STI region; a first patterned layer stacked on the first upwardly protruding structure; a second patterned layer stacked on the second upwardly protruding structure; a first contact structure disposed on a sidewall of the first upwardly protruding structure and being in direct contact with the first cell contact region, wherein the first patterned layer protrudes from a top surface of the first contact structure; and a second contact structure disposed on a sidewall of the second upwardly protruding structure and being in direct contact with the second cell contact region, wherein the second patterned layer protrudes from a top surface of the second contact structure.