RETICLE LAYOUT USED IN SCANNER SYSTEM TO REDUCE NECESSITY OF USING POSITION INFORMATION IN ADJACENT DIE

摘要

PURPOSE: A reticle layout used in a scanner system is provided to reduce the necessity of using position information in an adjacent die by preparing a reticle in which sub die regions are symmetrically disposed in the edge of a main die region. CONSTITUTION: The reticle(2) of a scanner includes a main die region(120). Two sub die regions(99) are disposed on the reticle at a side surface of the main die region. The sub die regions are disposed at both edges of the reticle. The sub die regions are symmetrical with each other.